20220618175600.0 http://ieeexplore.ieee.org/servlet/opac?punumber=4915548 1553-1813#ISSN Journal of vacuum science & technology. 0734-2101 Journal of vacuum science & technology. A. Vacuum, surfaces, and films Journal of vacuum science & technology. A. Vacuum, surfaces, and films 0734-2101 http://ojps.aip.org/jvsta/ New York (State) 0734-2101 http://ojps.aip.org/journals/doc/JVTAD6-home/top.html 0734-2101 0734-2101 Journal of vacuum science & technology.