@base . a . a , ; "Microsystems and nanosystems (Internet)" . . a ; "2198-0071" ; . "United States" . a ; . a ; "2198-0071" ; . a , , ; , , ; "Microsystems and nanosystems." ; ; ; ; "2198-0071" ; ; ; "2198-0071" ; ; "2198-0071" ; "Microsystems and nanosystems (Internet)" , "Microsystems and nanosystems." ; ; "http://link.springer.com/bookseries/11483" . a ; ; "20200206095000.0"^^ ; ; .