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ISSN Record 1523-553X

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Confirmed record

Key title: IEEE International Symposium on Semiconductor Manufacturing conference proceedings

Identifiers

ISSN:
1523-553X
ISSN-L:
1523-553X

Titles

Title proper:
IEEE International Symposium on Semiconductor Manufacturing conference proceedings.
Title variants:
Proceedings of ISSM ...
Title variants:
International Symposium on Semiconductor Manufacturing
Title variants:
ISSM
Title variants:
Conference proceedings

Publication

Medium:
Print
Issuing body:
IEEE Electron Devices Society.
Ultra Clean Society.
Semiconductor Equipment and Materials International.
Components, Packaging & Manufacturing Technology Society.
International Symposium on Semiconductor Manufacturing.
Normalized publisher:
Institute of Electrical and Electronics Engineers [Wikidata: Q131566]
Normalized publisher (brand):
[Wikidata: ]
Country:
UNITED STATES

Online

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Archival status

This resource has been partly archived by the keepers network.

Archival Status

Publisher Keeper Status Last updated Access

IEEE

Scholars Portal

Preserved
2025-09-02

IEEE, Inc.

Portico

Preserved
2026-02-12

IEEE, Inc.

Portico

Preserved
2026-02-12

IEEE, Inc.

Portico

Preserved
2026-02-12

IEEE, Inc.

Portico

Preserved
2026-02-12

Record

Last modified:
2025/10/23
ISSN Center responsible for the record:
United States

Notes

1:
Latest issue consulted: 2008.