Title of cluster (medium version) Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Key-title: Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)
Key-title: Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Title proper: Journal of vacuum science & technology. Microelectronics processing and phenomena :
Title proper: Journal of vacuum science & technology. Microelectronics processing and phenomena.
Other variant title: Journal of vacuum science and technology.
Other variant title: Microelectronics processing and phenomena
Other variant title: Journal of vacuum science and technology.
Other variant title: Microelectronics processing and phenomena
Country: United States
Country: United States
Record information
Last modification date: 03/05/2023
Type of record: Confirmed
Last modification date: 13/05/2024
Type of record: Confirmed
ISSN Center responsible of the record: ISSN National Centre for the USA
For all potential issues concerning the description of the publication identified by this bibliographic record (missing or wrong data etc.), please contact the ISSN National Centre mentioned above by clicking on the link.
ISSN Center responsible of the record: ISSN National Centre for the USA
For all potential issues concerning the description of the publication identified by this bibliographic record (missing or wrong data etc.), please contact the ISSN National Centre mentioned above by clicking on the link.