Key-title Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Title proper: Journal of vacuum science & technology. Microelectronics processing and phenomena :
Other variant title: Journal of vacuum science and technology.
Other variant title: Microelectronics processing and phenomena
Country: United States
Medium: Print
Record information
Last modification date: 25/09/2024
Type of record: Confirmed
ISSN Center responsible of the record: ISSN National Centre for the USA
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