ISSN Record 0734-211X

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Confirmed record

Key title: Journal of vacuum science & technology. B, Microelectronics processing and phenomena

Identifiers

ISSN:
0734-211X
ISSN-L:
0734-211X
ISSN-H:
9019-2931
CODEN (1):
JVTBD9

Titles

Title proper:
Journal of vacuum science & technology.
Title variants:
Journal of vacuum science and technology. B, Microelectronics processing and phenomena
Title variants:
Microelectronics processing and phenomena

Publication

Medium:
Print
Other media:
Online
Issuing body:
American Vacuum Society.
American Institute of Physics.
Normalized publisher:
AIP Publishing [Wikidata: Q27991300]
Normalized publisher (brand):
[Wikidata: ]
Country:
UNITED STATES

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Record

Last modified:
2024/11/28
ISSN Center responsible for the record:
United States