Key-title Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)
Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)
Title proper: Journal of vacuum science & technology. Microelectronics processing and phenomena.
Other variant title: Journal of vacuum science and technology.
Other variant title: Microelectronics processing and phenomena
Country: United States
Medium: Online
Digital Archives:
Digital Archives:
CLOCKSS Archive, CLOCKSS Archive, https://clockss.org, Online access with authorization, 2000/2008
Portico, Portico, https://portico.org/stable?cs=ISSN_23279877_15, No online access, 1983/1990
Record information
Last modification date: 13/05/2024
Type of record: Confirmed
ISSN Center responsible of the record: ISSN National Centre for the USA
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