Key-title  

Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)

Identifiers
Resource information
Archival Status
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Title proper: Journal of vacuum science & technology. Microelectronics processing and phenomena.

Other variant title: Journal of vacuum science and technology.

Other variant title: Microelectronics processing and phenomena

Country: United States

Medium: Online


logo Keepers
Status Publisher Keeper From To Updated Extent of archive
Preserved

AIP Publishing

Portico

1983

1990

28/04/2024

Preserved : 1983: 1(1-4), 1984: 2(1-4), 1985: 3(1-6), 1986: 4(1-6), 1987: 5(1-6), 1988: 6(1-6), 1989: 7(1-6), 1990: 8(1-6)
Archival Status
Status Publisher Keeper From To Updated Extent of archive
Preserved

AIP Publishing

Portico

1983

1990

28/04/2024

Preserved : 1983: 1(1-4), 1984: 2(1-4), 1985: 3(1-6), 1986: 4(1-6), 1987: 5(1-6), 1988: 6(1-6), 1989: 7(1-6), 1990: 8(1-6)
Record information

Last modification date: 13/05/2024

Type of record: Confirmed

ISSN Center responsible of the record: ISSN National Centre for the USA

For all potential issues concerning the description of the publication identified by this bibliographic record (missing or wrong data etc.), please contact the ISSN National Centre mentioned above by clicking on the link.

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