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ISSN Record 2327-9877

Identifiers

ISSN:: 2327-9877

ISSN-L:: 0734-211X

ISSN-H:: 9019-2931

Incorrect ISSN (1):: 0734-211X

CODEN (1):: JVTBD9

Titles

Title proper:: Journal of vacuum science & technology.

Title variants:: Journal of vacuum science and technology. B, Microelectronics processing and phenomena

Title variants:: Microelectronics processing and phenomena

Publication

Medium:: Online

Other media:: Print

Issuing body:: American Vacuum Society.; American Institute of Physics.

Normalized publisher:: AIP Publishing [Wikidata: Q27991300]

Normalized publisher (brand):: [Wikidata: ]

Country:: UNITED STATES

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Archival status

This resource has been partly archived by the keepers network.

Archival Status
Publisher	Keeper		Status	Last updated	Access
on 1
AIP Publishing	Portico		Preserved	2026-02-12
Preserved : 1983: 1(1-4), 1984: 2(1-4), 1985: 3(1-6), 1986: 4(1-6), 1987: 5(1-6), 1988: 6(1-6), 1989: 7(1-6), 1990: 8(1-6)

Record

Last modified:: 2025/12/15

ISSN Center responsible for the record:: United States

Notes

1:: Mode of access: World Wide Web.