ISSN-L Record 0734-211X
Key info
| ISSN | Medium | Key-title | From-To | Frequency | Country | Language | ||
|---|---|---|---|---|---|---|---|---|
| 0734-211X | Journal of vacuum science & technology. B, Microelectronics processing and phenomena | 1983-1990 | Bimonthly | USA | eng | |||
| 2327-9877 | Online | Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online) | 1983-1990 | Bimonthly | USA | eng |