Key-title Journal of vacuum science & technology. B, Microelectronics and nanometer structures
Journal of vacuum science & technology. B, Microelectronics and nanometer structures
Title proper: Journal of vacuum science & technology. Microelectronics and nanometer structures :
Other variant title: Journal of vacuum science & technology.
Other variant title: Microelectronics and nanometer structures
Other variant title: Journal of vacuum science and technology.
Other variant title: JVST B
Country: United States
Medium: Print
Record information
Last modification date: 06/02/2021
Type of record: Confirmed
ISSN Center responsible of the record: ISSN National Centre for the USA