ISSN Record 1071-1023
Identifiers
Titles
- Title proper:
- Journal of vacuum science & technology.
- Title variants:
- Journal of vacuum science & technology. B, International journal devoted to microelectronics and nanometer structures : (processing, measurement, and phenomena)
- Title variants:
- Microelectronics and nanometer structures
- Title variants:
- Journal of vacuum science and technology. B, Microelectronics and nanometer structures
- Title variants:
- JVST B
Publication
- Medium:
- Other media:
- Online
- Country:
- UNITED STATES
Online
Search in
Record
- Last modified:
- 2024/09/20
- ISSN Center responsible for the record:
- United States