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ISSN Record 1520-8567

Identifiers

ISSN:: 1520-8567

ISSN-L:: 1071-1023

ISSN-H:: 9019-2931

Incorrect ISSN (1):: 1071-1023

Titles

Title proper:: Journal of vacuum science & technology.

Title variants:: Journal of vacuum science and technology. B, Microelectronics and nanometer structures

Title variants:: Journal of vacuum science and technology. B. Online

Title variants:: Microelectronics and nanometer structures

Title variants:: JVST B

Title variants:: $I Issues for 2003- have issue PDF table of contents title: $a Journal of vacuum science & technology. B, An international journal devoted to microelectronics and nanometer structures. Processing, measurement, and phenomena

Publication

Medium:: Online

Other media:: Print

Country:: UNITED STATES

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Archival status

This resource has been partly archived by the keepers network.

Archival Status
Publisher	Keeper		Status	Last updated	Access
on 1
AIP Publishing	Portico		Preserved	2026-05-28
Preserved : 1991: 9(1-6), 1992: 10(1-6), 1993: 11(1-6), 1994: 12(1-6), 1995: 13(1-6), 1996: 14(1-6), 1997: 15(1-6), 1998: 16(1-6), 1999: 17(1-6), 2000: 18(1-6), 2001: 19(1-6), 2002: 20(1-6), 2003: 21(1-6), 2004: 22(1-6), 2005: 23(1-6), 2006: 24(1-6), 2007: 25(1-6), 2008: 26(1-6), 2009: 27(1-6)

Record

Last modified:: 2024/05/13

ISSN Center responsible for the record:: United States

Notes

1:: Mode of access: World Wide Web.

2:: Latest issue consulted: Vol. 24, no. 4 (Jul./Aug. 2006) (viewed Sept. 21, 2006).