Key-title Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online)
Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online)
Title proper: Journal of vacuum science & technology. Microelectronics and nanometer structures :
Other variant title: Journal of vacuum science and technology.
Other variant title: Journal of vacuum science and technology.
Other variant title: Microelectronics and nanometer structures
Other variant title: JVST B
Other variant title: $I Issues for 2003- have issue PDF table of contents title: $a Journal of vacuum science & technology.
Country: United States
Medium: Online
Digital Archives:
Digital Archives:
Portico, Portico, https://portico.org/stable?cs=ISSN_15208567_15, No online access, 1991/2009
Record information
Last modification date: 13/05/2024
Type of record: Confirmed
ISSN Center responsible of the record: ISSN National Centre for the USA
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