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ISSN Record 1932-5134

Identifiers

ISSN:: 1932-5134

ISSN-L:: 1932-5150

ISSN-H:: 9164-8424

Incorrect ISSN (1):: 1932-5150

Titles

Title proper:: Journal of micro/nanolithography, MEMS, and MOEMS :

Title variants:: JM³

Title variants:: J. Micro/Nanolith. MEMS MOEMS

Publication

Medium:: Online

Other media:: Print

Issuing body:: Society of Photo-Optical Instrumentation Engineers.

Normalized publisher:: SPIE [Wikidata: Q2140443]

Country:: UNITED STATES

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Archival status

This resource has been partly archived by the keepers network.

Archival Status
Publisher	Keeper		Status	Last updated	Access
on 1
SPIE	Scholars Portal		Preserved	2025-09-02
Preserved : 14 (3, 4); 2015
SPIE	Scholars Portal		Preserved	2025-09-02
Preserved : 6 (1 to 4); 7 (, 1 to 4); 8 (, 1 to 4); 9 (, 4); 10 (, 1, 2, 4); 11 (, 1, 2); 12 (, 1 to 4); 13 (, 1 to 4); 14 (, 1 to 4); 15 (, 1 to 4); 16 (, 1, 2, 4); 17 (, 1 to 4); 18 (, 1 to 4); 19 (, 1 to 4); 20 (, 1 to 4); 21 (, 1 to 4); 22 (, 1 to 3); 2007; 2008; 2009; 2010; 2011; 2012; 2013; 2014; 2015; 2016; 2017; 2018; 2019; 2020; 2021; 2022; 2023
SPIE	CLOCKSS Archive		Preserved	2026-02-09

Record

Last modified:: 2025/10/22

ISSN Center responsible for the record:: United States

Notes

1:: Mode of access: World Wide Web.

2:: Description based on: Vol. 6, issue 1 (Jan./Mar. 2007); title from table of contents (SPIE website, viewed Sept. 15, 2011).

3:: Latest issue consulted: Vol. 12(2) (Apr./June 2013) (SPIE website, viewed Apr. 5, 2013).