ISSN Record 1932-5150

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Confirmed record

Key title: Journal of micro/nanolithography, MEMS, and MOEMS

Identifiers

ISSN:
1932-5150
ISSN-L:
1932-5150
ISSN-H:
9164-8424
Incorrect ISSN (1):
1537-1646

Titles

Title proper:
Journal of micro/nanolithography, MEMS, and MOEMS
Title variant:
JM3

Publication

Medium:
Print
Other media:
Online
Issuing body:
Society of Photo-optical Instrumentation Engineers.
Normalized publisher:
SPIE [Wikidata: Q2140443]
Country:
UNITED STATES

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Record

Last modified:
2025/03/12
ISSN Center responsible for the record:
United States