ISSN Record 2166-2746

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Confirmed record

Key title: Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Print)

Identifiers

ISSN:
2166-2746
ISSN-L:
2166-2746
ISSN-H:
9019-2931
Incorrect ISSN (2):
1071-1023 , 0734-211X

Titles

Title proper:
Journal of vacuum science and technology.
Title variants:
Nanotechnology & microelectronics
Title variants:
JVST B, Nanotechnology & microelectronics
Title variants:
Nanotechnology and microelectronics
Title variants:
Journal of vacuum science and technology. B, International journal devoted to microelectronics and nanometer structures : (processing, measurement, & phenomena)
Title variants:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Publication

Medium:
Print
Other media:
Online
Issuing body:
American Vacuum Society.
American Institute of Physics.
Country:
UNITED STATES

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Record

Last modified:
2024/09/25
ISSN Center responsible for the record:
United States

Notes

1:
Description based on: 2nd ser., v. 28, no. 2 (Mar./Apr. 2010); title from cover.
2:
Latest issue consulted: 2nd ser., v. 30, no. 3 (May/June 2012).