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ISSN Record 2166-2754

Identifiers

ISSN:: 2166-2754

ISSN-L:: 2166-2746

ISSN-H:: 9019-2931

Titles

Title proper:: Journal of vacuum science and technology.

Title variants:: Nanotechnology & microelectronics

Title variants:: Nanotechnology and microelectronics

Title variants:: Journal of vacuum science and technology. B, International journal devoted to microelectronics and nanometer structures :

Title variants:: JVST B

Title variants:: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Publication

Medium:: Online

Other media:: Print

Issuing body:: American Vacuum Society.; American Institute of Physics.

Country:: UNITED STATES

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Archival status

This resource has been partly archived by the keepers network.

Archival Status
Publisher	Keeper		Status	Last updated	Access
on 1
AIP Publishing	Portico		Preserved	2026-02-12
Preserved : 2010: 28(1-6), 2011: 29(1-6), 2012: 30(1-6), 2013: 31(1-6), 2014: 32(1-6), 2015: 33(1-6), 2016: 34(1-6), 2017: 35(1-6), 2018: 36(1-6), 2019: 37(1-6), 2020: 38(1-6), 2021: 39(1-6), 2022: 40(1-6), 2023: 41(1-6), 2024: 42(1-6), 2025: 43(1-6), 2026: 44(1-2)
American Vacuum Society	CLOCKSS Archive		Preserved	2026-02-09
34 to 44

Record

Last modified:: 2025/12/14

ISSN Center responsible for the record:: United States

Notes

1:: Description based on print version record.