Key-title Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Online)
Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Online)
Title proper: Journal of vacuum science and technology. Nanotechnology & microelectronics :
Other variant title: Nanotechnology & microelectronics
Other variant title: Nanotechnology and microelectronics
Other variant title: Journal of vacuum science and technology.
Other variant title: JVST B
Other variant title: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Country: United States
Medium: Online
Digital Archives:
Digital Archives:
CLOCKSS Archive, CLOCKSS Archive, https://clockss.org, Online access with authorization, 2015/2024
Portico, Portico, https://www.portico.org, Online access with authorization, 2010/2024
Record information
Last modification date: 06/02/2021
Type of record: Confirmed
ISSN Center responsible of the record: ISSN National Centre for the USA
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