Title of cluster (medium version) Journal of vacuum science and technology. B, Nanotechnology & microelectronics
Journal of vacuum science and technology. B, Nanotechnology & microelectronics
Key-title: Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Online)
Key-title: Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Print)
Title proper: Journal of vacuum science and technology. Nanotechnology & microelectronics :
Title proper: Journal of vacuum science and technology. Nanotechnology & microelectronics :
Other variant title: Nanotechnology & microelectronics
Other variant title: Nanotechnology and microelectronics
Other variant title: Journal of vacuum science and technology.
Other variant title: JVST B
Other variant title: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Other variant title: Nanotechnology & microelectronics
Other variant title: JVST B, Nanotechnology & microelectronics
Other variant title: Nanotechnology and microelectronics
Other variant title: Journal of vacuum science and technology.
Other variant title: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Country: United States
Country: United States
Record information
Last modification date: 06/02/2021
Type of record: Confirmed
Last modification date: 25/09/2024
Type of record: Confirmed
ISSN Center responsible of the record: ISSN National Centre for the USA
For all potential issues concerning this bibliographic record (missing or wrong data etc.), please contact the ISSN National Centre mentioned above by clicking on the link.
ISSN Center responsible of the record: ISSN National Centre for the USA
For all potential issues concerning this bibliographic record (missing or wrong data etc.), please contact the ISSN National Centre mentioned above by clicking on the link.