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Identifiers

ISSN :

0734-211X

Linking ISSN (ISSN-L): 0734-211X

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Key-title  

Journal of vacuum science & technology. B, Microelectronics processing and phenomena

Identifiers
ISSN :

0734-211X

Linking ISSN (ISSN-L): 0734-211X

Resource information

Title proper: Journal of vacuum science & technology. Microelectronics processing and phenomena :

Other variant title: Journal of vacuum science and technology.

Other variant title: Microelectronics processing and phenomena

Country: United States

Medium: Print



Record information

Last modification date: 03/05/2023

Type of record: Confirmed

ISSN Center responsible of the record: ISSN National Centre for the USA

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